1. Loading
Beha crucible ea quartz e koahetsoeng holim'a tafole ea phapanyetsano ea mocheso, eketsa lisebelisoa tse tala tsa silicon, ebe u kenya lisebelisoa tsa ho futhumatsa, lisebelisoa tsa ho kenya letsoho le sekoahelo sa sebōpi, tlosa sebōpi ho fokotsa khatello ea sebōpi ho 0.05-0.1mbar le ho boloka vacuum. Hlahisa argon e le khase e sireletsang ho boloka khatello ka sebōping ha e le hantle e le ho pota 400-600mbar.
2. Ho futhumatsa
Sebelisa heater ea graphite ho futhumatsa 'mele oa sebōpi, qala ka mouoane oa mongobo o pharalletseng holim'a likarolo tsa graphite, lera la insulation, lisebelisoa tse tala tsa silicon, joalo-joalo, ebe butle-butle futhumatsa ho etsa hore mocheso oa quartz crucible o fihle ho 1200-1300.℃. Ts'ebetso ena e nka lihora tse 4-5.
3. Ho qhibiliha
Hlahisa argon e le khase e sireletsang ho boloka khatello ka sebōping ha e le hantle e le ho pota 400-600mbar. Butle-butle eketsa matla a ho futhumatsa ho ikamahanya le mocheso ka har'a crucible ho hoo e ka bang 1500℃, 'me thepa e tala ea silicon e qala ho qhibiliha. Boloka hoo e ka bang 1500℃nakong ea ho qhibiliha ho fihlela ho qhibiliha ho phethiloe. Ts'ebetso ena e nka lihora tse ka bang 20-22.
4. Khōlo ea kristale
Kamora hore thepa e tala ea silicon e qhibilihe, matla a ho futhumatsa a fokotsehile ho etsa hore mocheso oa crucible o theohe hoo e ka bang 1420-1440.℃, e leng ntlha e qhibilihang ea silicon. Ebe crucible ea quartz butle-butle e theohela tlaase, kapa sesebelisoa sa ho kenya letsoho se phahama butle-butle, e le hore crucible ea quartz e tlohe butle-butle sebakeng sa ho futhumatsa ebe e etsa phapanyetsano ea mocheso le libaka tse potolohileng; ka nako e ts'oanang, metsi a fetisoa ka poleiti e pholileng ho fokotsa mocheso oa ho qhibiliha ho tloha tlaase, 'me silicon ea crystalline e qala ho thehoa ka tlaase. Nakong ea ts'ebetso ea kholo, sebopeho se tiileng-se metsi se lula se tšoana le sefofane se otlolohileng ho fihlela kholo ea kristale e phethiloe. Ts'ebetso ena e nka lihora tse ka bang 20-22.
5. Ho tlatsa
Ka mor'a hore khōlo ea kristale e phethoe, ka lebaka la mocheso o moholo oa mocheso pakeng tsa tlase le holimo ho kristale, khatello ea mocheso e ka 'na ea e-ba teng ka har'a ingot, eo ho leng bonolo ho e senya hape nakong ea ho futhumala ha lesela la silicon le ho lokisoa ha betri. . Ka hona, ka mor'a hore khōlo ea kristale e phethoe, ingot ea silicon e bolokiloe haufi le sebaka sa ho qhibiliha bakeng sa lihora tsa 2-4 ho etsa mocheso oa seaparo sa silicon se ingot le ho fokotsa khatello ea mocheso.
6. Ho pholisa
Ka mor'a hore silicon e kenngoe ka sebōping, tima matla a ho futhumatsa, phahamisa sesebelisoa sa ho kenya mocheso kapa u theole ka ho feletseng silicon e kenang, 'me u kenye phallo e kholo ea khase ea argon ka sebōping ho fokotsa butle-butle mocheso oa silicon e haufi. mocheso oa kamore; ka nako e ts'oanang, khatello ea khase ka sebōping e nyoloha butle-butle ho fihlela e fihla khatellong ea sepakapaka. Ts'ebetso ena e nka lihora tse ka bang 10.
Nako ea poso: Sep-20-2024